Inventor · disambiguated record
Pavel N. Laptev
Also filed as: LAPTEV PAVEL N
5 granted patents·1 pending application·22 citations·filing 2001–2009
74Inventor score
Top patents by PatentIndex Score
6 records- 0179US8808513B2Stress adjustment in reactive sputteringLAPTEV PAVEL N·Filed 2009·Granted Aug 19, 2014·5 cites·14 claims
- 0276US7179350B2Reactive sputtering of silicon nitride films by RF supported DC magnetronTEGAL CORP·Filed 2003·Granted Feb 20, 2007·15 cites·57 claims
- 0367US8691057B2Stress adjustment in reactive sputteringLAPTEV PAVEL N·Filed 2009·Granted Apr 8, 2014·1 cites·11 claims
- 0454US2009246385A1Control of crystal orientation and stress in sputter deposited thin filmsTEGAL CORP·Filed 2009·Application pending·0 cites
- 0542US7467598B2System for, and method of, etching a surface on a waferTEGAL CORP·Filed 2001·Granted Dec 23, 2008·1 cites·30 claims
- 0637US7270729B2System for, and method of, etching a surface on a waferTEGAL CORP·Filed 2003·Granted Sep 18, 2007·0 cites·12 claims
Join the waitlist — get patent alerts
Get an alert when Pavel N. Laptev files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →