Inventor · disambiguated record
Paulus Clemens Maria Planken
Also filed as: PLANKEN PAULUS CLEMENS MARIA
2 granted patents·1 pending application·6 citations·filing 2018–2024
51Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0187US10788765B2Method and apparatus for measuring a structure on a substrateASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·4 cites·20 claims
- 0279US11042096B2Alignment measurement systemASML NETHERLANDS BV·Filed 2018·Granted Jun 22, 2021·2 cites·21 claims
- 0360US2024184222A1Metrology method and apparatusASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →