Inventor · disambiguated record
Paul Rhoades
Also filed as: RHOADES PAUL
2 granted patents·182 citations·filing 1991–1995
70Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0184US5269879AMethod of etching vias without sputtering of underlying electrically conductive layerLAM RES CORP·Filed 1991·Granted Dec 14, 1993·133 cites·19 claims
- 0270US5658425AMethod of etching contact openings with reduced removal rate of underlying electrically conductive titanium silicide layerLAM RES CORP·Filed 1995·Granted Aug 19, 1997·49 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →