Inventor · disambiguated record
Pavel Smal
Also filed as: SMAL PAVEL
1 granted patent·3 pending applications·0 citations·filing 2019–2023
8Inventor score
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0153US2025383606A1Projection system controlASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0247US2023341784A1Method and apparatus for identifying contamination in a semiconductor fabASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0346US2025383649A1Classifying product unitsASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0437US12007701B2Determining a mark layout across a patterning device or substrateASML NETHERLANDS BV·Filed 2019·Granted Jun 11, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →