Inventor · disambiguated record
Payam Tayebati
Also filed as: TAYEBATI PAYAM
8 granted patents·1 pending application·79 citations·filing 2008–2017
86Inventor score
Technology areasG03F
Top patents by PatentIndex Score
9 records- 0195US7830611B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Nov 9, 2010·34 cites·48 claims
- 0293US8325322B2Optical correction deviceHAUF MARKUS·Filed 2010·Granted Dec 4, 2012·16 cites·20 claims
- 0392US8508854B2Optical element and methodEVA ERIC·Filed 2010·Granted Aug 13, 2013·12 cites·59 claims
- 0491US7990622B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2010·Granted Aug 2, 2011·7 cites·47 claims
- 0583US8891172B2Optical element and methodEVA ERIC·Filed 2009·Granted Nov 18, 2014·7 cites·7 claims
- 0673US8902401B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2012·Granted Dec 2, 2014·1 cites·22 claims
- 0771US8363206B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2008·Granted Jan 29, 2013·2 cites·48 claims
- 0861US9810996B2Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2014·Granted Nov 7, 2017·0 cites·41 claims
- 0960US2018181007A1Optical imaging device with thermal attenuationZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →