Inventor · disambiguated record
Pei-Shiang Chen
Also filed as: CHEN PEI-SHIANG
10 granted patents·227 citations·filing 2011–2014
91Inventor score
Top patents by PatentIndex Score
10 records- 0197US9305799B2Method and system for E-beam lithography with multi-exposureTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Apr 5, 2016·26 cites·20 claims
- 0297US8601407B2Geometric pattern data quality verification for maskless lithographyWANG HUNG-CHUN·Filed 2011·Granted Dec 3, 2013·31 cites·20 claims
- 0397US8507159B2Electron beam data storage system and method for high volume manufacturingWANG HUNG-CHUN·Filed 2011·Granted Aug 13, 2013·29 cites·16 claims
- 0496US8945803B2Smart subfield method for E-beam lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Feb 3, 2015·26 cites·20 claims
- 0596US8841049B2Electron beam data storage system and method for high volume manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 23, 2014·28 cites·20 claims
- 0695US8835082B2Method and system for E-beam lithography with multi-exposureCHEN PEI-SHIANG·Filed 2012·Granted Sep 16, 2014·28 cites·20 claims
- 0795US8609308B1Smart subfield method for E-beam lithographyCHEN PEI-SHIANG·Filed 2012·Granted Dec 17, 2013·31 cites·20 claims
- 0895US8563224B1Data process for E-beam lithographyCHEN CHENG-HUNG·Filed 2012·Granted Oct 22, 2013·28 cites·20 claims
- 0963US9336986B2Electron beam data storage system and method for high volume manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted May 10, 2016·0 cites·20 claims
- 1058US8877410B2Data process for E-beam lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Nov 4, 2014·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →