Inventor · disambiguated record
Peter D'Elia
Also filed as: D'ELIA PETER
3 granted patents·4 pending applications·0 citations·filing 2023–2024
43Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0173US12506019B2Wafer chuck designs and methods for retaining a processing liquid on a surface of a semiconductor waferTOKYO ELECTRON LTD·Filed 2024·Granted Dec 23, 2025·0 cites·22 claims
- 0272US2025285884A1Wet Processing Systems Having Novel Wafer Chuck Designs For Retaining A Processing Liquid On A Surface Of A Semiconductor SubstrateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0371US2024399422A1Method and single wafer processing system for processing of semiconductor wafersTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0467US12103052B2Method and single wafer processing system for processing of semiconductor wafersTOKYO ELECTRON LTD·Filed 2023·Granted Oct 1, 2024·0 cites·22 claims
- 0555US2025299981A1System and method for adjusting etch selectivity of etchant solutionTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0652US2025226208A1Methods for protecting a peripheral edge and backside of a semiconductor substrateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0751US12288698B2Methods for retaining a processing liquid on a surface of a semiconductor substrateTOKYO ELECTRON LTD·Filed 2023·Granted Apr 29, 2025·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →