Inventor · disambiguated record
Peter Dirksen
Also filed as: DIRKSEN PETER
55 granted patents·21 pending applications·2,127 citations·filing 1994–2025
98Inventor score
Files withKONINKLIJKE PHILIPS NV26KONINKL PHILIPS ELECTRONICS NV12PHILIPS CORP9DIRKSEN PETER8ASML NETHERLANDS BV7
Top patents by PatentIndex Score
76 records- 0199US6046792ADifferential interferometer system and lithographic step-and-scan apparatus provided with such a systemPHILIPS CORP·Filed 1997·Granted Apr 4, 2000·849 cites·14 claims
- 0298US7050146B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 23, 2006·165 cites·33 claims
- 0396US5674650AMethod of repetitively imaging a mask pattern on a substrate, and apparatus for performing the methodPHILIPS CORP·Filed 1995·Granted Oct 7, 1997·170 cites·26 claims
- 0494US9539854B2Capacitive micromachined ultrasound transducerKONINKLIJKE PHILIPS NV·Filed 2015·Granted Jan 10, 2017·7 cites·13 claims
- 0594US6368763B2Method of detecting aberrations of an optical imaging systemPHILIPS CORP·Filed 2001·Granted Apr 9, 2002·69 cites·10 claims
- 0693US7145641B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Dec 5, 2006·45 cites·18 claims
- 0792US8327521B2Method for production and using a capacitive micro-machined ultrasonic transducerDIRKSEN PETER·Filed 2008·Granted Dec 11, 2012·87 cites·22 claims
- 0892US6248486B1Method of detecting aberrations of an optical imaging systemPHILIPS CORP·Filed 1999·Granted Jun 19, 2001·91 cites·8 claims
- 0992US6160622AAlignment device and lithographic apparatus comprising such a deviceASM LITHOGRAPHY BV·Filed 1998·Granted Dec 12, 2000·105 cites·23 claims
- 1091US8689606B2Gas sensing using ultrasoundSCHELLEKENS MARTIJN·Filed 2010·Granted Apr 8, 2014·52 cites·20 claims
- 1190US8401513B2Proximity sensor, in particular microphone for reception of sound signals in the human audible sound range, with ultrasonic proximity estimationLANGEREIS GEERT·Filed 2010·Granted Mar 19, 2013·23 cites·17 claims
- 1289US8148052B2Double patterning for lithography to increase feature spatial densityVANLEENHOVE ANJA MONIQUE·Filed 2007·Granted Apr 3, 2012·39 cites·17 claims
- 1388USRE42849ELithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 18, 2011·8 cites·45 claims
- 1485US9132693B2Capacitive micromachine ultrasound transducerKLOOTWIJK JOHAN H·Filed 2009·Granted Sep 15, 2015·29 cites·15 claims
- 1585US5910847AMethod of determining the radiation dose in a lithographic apparatusPHILIPS CORP·Filed 1997·Granted Jun 8, 1999·59 cites·14 claims
- 1684US11458504B2Systems and methods of operation of capacitive radio frequency micro-electromechanical switchesKONINKLIJKE PHILIPS NV·Filed 2017·Granted Oct 4, 2022·2 cites·11 claims
- 1784US9550211B2Temperature compensation in a CMUT deviceDIRKSEN PETER·Filed 2012·Granted Jan 24, 2017·11 cites·16 claims
- 1884US9231496B2Capacitive micro-machined transducer and method of manufacturing the sameKONINKL PHILIPS NV·Filed 2013·Granted Jan 5, 2016·4 cites·20 claims
- 1984US8193685B2Thin film detector for presence detectionKLEE MAREIKE·Filed 2008·Granted Jun 5, 2012·32 cites·8 claims
- 2083US10092270B2Pre-collapsed CMUT with mechanical collapse retentionDIRKSEN PETER·Filed 2010·Granted Oct 9, 2018·6 cites·20 claims
- 2181US6417922B1Alignment device and lithographic apparatus comprising such a deviceASML NETHERLANDS BV·Filed 1999·Granted Jul 9, 2002·65 cites·17 claims
- 2278US9828236B2Capacitive micro-machined transducer and method of manufacturing the sameKONINKLIJKE PHILIPS NV·Filed 2013·Granted Nov 28, 2017·3 cites·15 claims
- 2378US7037626B2Lithographic method of manufacturing a deviceKONINKL PHILIPS ELECTRONICS NV·Filed 2002·Granted May 2, 2006·19 cites·17 claims
- 2478US6331368B2Test object for use in detecting aberrations of an optical imaging systemPHILIPS CORP·Filed 2001·Granted Dec 18, 2001·14 cites·7 claims
- 2578US5485272ARadiation-source unit for generating a beam having two directions of polarisation and two frequenciesPHILIPS CORP·Filed 1994·Granted Jan 16, 1996·51 cites·20 claims
- 2678US2024197288A1Acoustically transparent window for intraluminal ultrasound imaging deviceKONINKLIJKE PHILIPS NV·Filed 2023·Application pending·0 cites
- 2777US10923099B2Acoustical lens and ultrasound transducer probeKONINKLIJKE PHILIPS NV·Filed 2015·Granted Feb 16, 2021·3 cites·19 claims
- 2876US6544694B2Method of manufacturing a device by means of a mask phase-shifting mask for use in said methodKONINKL PHILIPS ELECTRONICS NV·Filed 2001·Granted Apr 8, 2003·15 cites·13 claims
- 2975US9534949B2Pre-collapsed capacitive micro-machined transducer cell with stress layerKONINKLIJKE PHILIPS NV·Filed 2012·Granted Jan 3, 2017·3 cites·14 claims
- 3074US9440258B2Thin film ultrasound transducerKLEE MAREIKE·Filed 2011·Granted Sep 13, 2016·3 cites·19 claims
- 3173US5917604AAlignment device and lithographic apparatus provided with such a devicePHILIPS CORP·Filed 1997·Granted Jun 29, 1999·46 cites·22 claims
- 3273US2023012105A1Systems and methods of operation of capacitive radio frequency micro-electromechanical switchesKONINKLIJKE PHILIPS NV·Filed 2022·Application pending·0 cites
- 3372US7142287B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Nov 28, 2006·2 cites·10 claims
- 3472US2025176940A1Ultrasound imaging system using an array of transducer elements and an imaging methodKONINKLIJKE PHILIPS NV·Filed 2025·Application pending·0 cites
- 3571US9117438B2Pre-collapsed capacitive micro-machined transducer cell with plugKONINKL PHILIPS NV·Filed 2012·Granted Aug 25, 2015·4 cites·20 claims
- 3671US7230674B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jun 12, 2007·2 cites·24 claims
- 3769US9986916B2Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focusKOEHLER MAX OSKAR·Filed 2011·Granted Jun 5, 2018·5 cites·20 claims
- 3868US10293375B2CMUT device manufacturing method, CMUT device and apparatusKONINKLIJKE PHILIPS NV·Filed 2014·Granted May 21, 2019·1 cites·14 claims
- 3968US5673101AMethod of repetitively imaging a mask pattern on a substrate, and apparatus for performing the methodPHILIPS CORP·Filed 1995·Granted Sep 30, 1997·29 cites·14 claims
- 4065US12239486B2Ultrasound imaging system using an array of transducer elements and an imaging methodKONINKLIJKE PHILIPS NV·Filed 2019·Granted Mar 4, 2025·0 cites·2 claims
- 4164US11386883B2Acoustic lens for an ultrasound arrayKONINKLIJKE PHILIPS NV·Filed 2016·Granted Jul 12, 2022·1 cites·10 claims
- 4263US8686376B2Microarray characterization system and methodWIMBERGER-FRIEDL REINHOLD·Filed 2009·Granted Apr 1, 2014·3 cites·12 claims
- 4358US2025318801A1Flow measurementKONINKLIJKE PHILIPS NV·Filed 2023·Application pending·0 cites
- 4457US11857361B2Acoustically transparent window for intraluminal ultrasound imaging deviceKONINKLIJKE PHILIPS NV·Filed 2019·Granted Jan 2, 2024·0 cites·26 claims
- 4555US9177468B2Ultrasonic transmission / reception for electromagnetic transmission receptionDIRKSEN PETER·Filed 2009·Granted Nov 3, 2015·0 cites·14 claims
- 4655US8890076B2Bolometer and method of manufacturing the sameDIRKSEN PETER·Filed 2012·Granted Nov 18, 2014·1 cites·15 claims
- 4755US2016365840A1Thin film ultrasound transducerPHILIPS LIGHTING HOLDING BV·Filed 2016·Application pending·0 cites
- 4854US9917535B2Wafer and method of manufacturing the sameKONINKLIJKE PHILIPS NV·Filed 2013·Granted Mar 13, 2018·0 cites·11 claims
- 4953US10736606B2Acoustic window layer for an ultrasound arrayKONINKLIJKE PHILIPS NV·Filed 2016·Granted Aug 11, 2020·0 cites·15 claims
- 5051US10008958B2Capacitive micro-machined transducer and method of manufacturing the sameKONINKLIJKE PHILIPS NV·Filed 2015·Granted Jun 26, 2018·0 cites·12 claims
Showing the top 50 of 76 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Peter Dirksen files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →