Inventor · disambiguated record
Peter Ekberg
Also filed as: EKBERG PETER
10 granted patents·6 pending applications·271 citations·filing 2000–2011
91Inventor score
Files withMICRONIC LASER SYSTEMS AB10EKBERG PETER1MICRONIC LASER SYSTEM AB1SANDSTROM TORBJORN1SJOSTROM FREDRIK1
Top patents by PatentIndex Score
16 records- 0196US6883158B1Method for error reduction in lithographyMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Apr 19, 2005·130 cites·38 claims
- 0293US7444616B2Method for error reduction in lithographyMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Oct 28, 2008·56 cites·9 claims
- 0379US6948254B2Method for calibration of a metrology stageMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Sep 27, 2005·18 cites·15 claims
- 0479US6700600B1Beam positioning in microlithography writingMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Mar 2, 2004·22 cites·30 claims
- 0575US7285365B2Image enhancement for multiple exposure beamsMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Oct 23, 2007·12 cites·9 claims
- 0674US7709165B2Image enhancement for multiple exposure beamsMICRONIC LASER SYSTEMS AB·Filed 2007·Granted May 4, 2010·3 cites·4 claims
- 0773US7488957B2Pattern generation methods and apparatusesMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Feb 10, 2009·5 cites·20 claims
- 0872US6844123B1System for production of large area display panels with improved precisionMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Jan 18, 2005·16 cites·22 claims
- 0960US7912671B2Method for measuring the position of a mark in a deflector systemMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Mar 22, 2011·3 cites·14 claims
- 1056US7148971B2Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surfaceMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Dec 12, 2006·6 cites·36 claims
- 1153US2009104549A1Method for error reduction in lithographySANDSTROM TORBJORN·Filed 2008·Application pending·0 cites
- 1246US2011307211A1Method For Measuring The Position Of A Mark In A Deflector SystemSTIBLERT LARS·Filed 2011·Application pending·0 cites
- 1344US2009175530A1Methods and apparatuses for detecting pattern errorsSJOSTROM FREDRIK·Filed 2008·Application pending·0 cites
- 1442US2008078960A1Pattern generation methods and apparatusesEKBERG PETER·Filed 2007·Application pending·0 cites
- 1541US2005088664A1Method for writing a pattern on a surface intended for use in exposure equipment and for measuring the physical properties of the surfaceFiled 2003·Application pending·0 cites
- 1639US2009234611A1Method For Measuring The Position Of A Mark In A Micro Lithographic Deflector SystemMICRONIC LASER SYSTEM AB·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →