Inventor · disambiguated record
Peter Hahmann
Also filed as: HAHMANN PETER
2 granted patents·1 pending application·24 citations·filing 1999–2005
59Inventor score
Files withLEICA MICROSYS LITHOGRAPHY LTD3
Top patents by PatentIndex Score
3 records- 0160US6600162B1Method and device for exposing a substrate to lightLEICA MICROSYS LITHOGRAPHY LTD·Filed 1999·Granted Jul 29, 2003·18 cites·15 claims
- 0253US6635395B2Method for exposing a layout comprising multiple layers on a waferLEICA MICROSYS LITHOGRAPHY LTD·Filed 2001·Granted Oct 21, 2003·6 cites·9 claims
- 0331US2006121396A1Method for exposing a substrate with a beamLEICA MICROSYS LITHOGRAPHY LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →