Inventor · disambiguated record
Peter Michel Silvester Maria Heijmans
Also filed as: HEIJMANS PETER MICHEL SILVESTER MARIA
8 granted patents·6 citations·filing 2013–2022
76Inventor score
Files withASML NETHERLANDS BV8
Top patents by PatentIndex Score
8 records- 0176US10191392B2Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuatorASML NETHERLANDS BV·Filed 2015·Granted Jan 29, 2019·2 cites·24 claims
- 0273US11262663B2Tubular linear actuator, patterning device masking device and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 1, 2022·1 cites·12 claims
- 0366US10372045B2Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuatorASML NETHERLANDS BV·Filed 2013·Granted Aug 6, 2019·2 cites·13 claims
- 0462US11837931B2Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims
- 0555US10114300B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Oct 30, 2018·1 cites·17 claims
- 0650US11303175B2Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 12, 2022·0 cites·14 claims
- 0743US9293951B2Lithographic apparatus and lorentz actuatorASML NETHERLANDS BV·Filed 2013·Granted Mar 22, 2016·0 cites·20 claims
- 0837US11112705B2Motor, dual stroke stage and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Sep 7, 2021·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →