Inventor · disambiguated record
Peter M. Kopalidis
Also filed as: KOPALIDIS PETER M
5 granted patents·103 citations·filing 1999–2013
79Inventor score
Top patents by PatentIndex Score
5 records- 0187US6221169B1System and method for cleaning contaminated surfaces in an ion implanterAXCELIS TECH INC·Filed 1999·Granted Apr 24, 2001·64 cites·19 claims
- 0284US9852887B2Ion source of an ion implanterADVANCED ION BEAM TECH INC·Filed 2013·Granted Dec 26, 2017·6 cites·68 claims
- 0377US8653807B2Apparatus and method for measuring ion beam currentKOPALIDIS PETER M·Filed 2010·Granted Feb 18, 2014·4 cites·18 claims
- 0469US6259105B1System and method for cleaning silicon-coated surfaces in an ion implanterAXCELIS TECH INC·Filed 1999·Granted Jul 10, 2001·29 cites·20 claims
- 0545US8890506B2Apparatus and method for measuring ion beam currentKOPALIDIS PETER M·Filed 2011·Granted Nov 18, 2014·0 cites·18 claims
Join the waitlist — get patent alerts
Get an alert when Peter M. Kopalidis files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →