Inventor · disambiguated record
Peter Nieland
Also filed as: NIELAND PETER
1 granted patent·1 pending application·0 citations·filing 2021–2022
4Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0152US2022283503A1Method for mounting an optical systemZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 0239US11754934B2Projection exposure apparatus for semiconductor lithography having an optical element with sensor reference and method for aligning the sensor referenceZEISS CARL SMT GMBH·Filed 2021·Granted Sep 12, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →