Inventor · disambiguated record
Peter Satitpunwaycha
Also filed as: SATITPUNWAYCHA PETER
11 granted patents·11 pending applications·359 citations·filing 1997–2013
91Inventor score
Top patents by PatentIndex Score
22 records- 0196US7128806B2Mask etch processing apparatusAPPLIED MATERIALS INC·Filed 2003·Granted Oct 31, 2006·131 cites·34 claims
- 0287US6045666AAluminum hole filling method using ionized metal adhesion layerAPPLIED MATERIALS INC·Filed 1997·Granted Apr 4, 2000·61 cites·31 claims
- 0383US9175392B2System for multi-region processingSATITPUNWAYCHA PETER·Filed 2011·Granted Nov 3, 2015·4 cites·20 claims
- 0479US6219219B1Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1998·Granted Apr 17, 2001·63 cites·20 claims
- 0578US7785172B2Combinatorial processing including rotation and movement within a regionINTERMOLECULAR INC·Filed 2007·Granted Aug 31, 2010·6 cites·13 claims
- 0676US6238533B1Integrated PVD system for aluminum hole filling using ionized metal adhesion layerAPPLIED MATERIALS INC·Filed 1997·Granted May 29, 2001·33 cites·22 claims
- 0774US6159055ARF electrode contact assembly for a detachable electrostatic chuckAPPLIED MATERIALS INC·Filed 1998·Granted Dec 12, 2000·45 cites·7 claims
- 0867US7879151B2Mask etch processing apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Feb 1, 2011·2 cites·15 claims
- 0959US8709270B2Masking method and apparatusSATITPUNWAYCHA PETER·Filed 2011·Granted Apr 29, 2014·1 cites·8 claims
- 1057US6139679ACoil and coil feedthroughAPPLIED MATERIALS INC·Filed 1998·Granted Oct 31, 2000·13 cites·30 claims
- 1157US2014190632A1Method and apparatus for photomask plasma etchingAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1256US7682984B2Interferometer endpoint monitoring deviceAPPLIED MATERIALS INC·Filed 2006·Granted Mar 23, 2010·0 cites·19 claims
- 1352US2007017898A1Method and apparatus for photomask plasma etchingKUMAR AJAY·Filed 2006·Application pending·0 cites
- 1447US2013145989A1Substrate processing tool showerheadSATITPUNWAYCHA PETER·Filed 2011·Application pending·0 cites
- 1547US2014133265A1Contactless Magnetically Driven Agitation SystemsINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1647US2014166134A1Pump with Reduced Number of Moving PartsINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1747US2013136862A1Multi-cell mocvd apparatusSATITPUNWAYCHA PETER·Filed 2011·Application pending·0 cites
- 1845US2006000802A1Method and apparatus for photomask plasma etchingKUMAR AJAY·Filed 2004·Application pending·0 cites
- 1943US2014147593A1Liquid Cooled Sputter Apertured ShieldsINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 2043US2005067103A1Interferometer endpoint monitoring deviceAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 2139US2005133166A1Tuned potential pedestal for mask etch processing apparatusAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2235US2002096195A1Method and apparatus for critical flow particle removalAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →