Inventor · disambiguated record
Petra Spies
Also filed as: SPIES PETRA
7 granted patents·4 pending applications·38 citations·filing 2004–2024
81Inventor score
Top patents by PatentIndex Score
11 records- 0186US8632687B2Method for electron beam induced etching of layers contaminated with galliumAUTH NICOLE·Filed 2009·Granted Jan 21, 2014·14 cites·24 claims
- 0285US9721754B2Method and apparatus for processing a substrate with a focused particle beamBRET TRISTAN·Filed 2011·Granted Aug 1, 2017·10 cites·33 claims
- 0374US9023666B2Method for electron beam induced etchingAUTH NICOLE·Filed 2009·Granted May 5, 2015·5 cites·26 claims
- 0470US8623230B2Methods and systems for removing a material from a sampleAUTH NICOLE·Filed 2008·Granted Jan 7, 2014·3 cites·37 claims
- 0558US2023185180A1Method and apparatus for etching a lithography maskZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0655US2024419065A1Method and apparatus for mask repairCarl Zeisss SMT GmbH·Filed 2024·Application pending·0 cites
- 0753US7786403B2Method for high-resolution processing of thin layers using electron beamsNAWO TEC GMBH·Filed 2004·Granted Aug 31, 2010·6 cites·14 claims
- 0849US2023305386A1Method and apparatus for mask repairZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0948US8318593B2Method for electron beam induced deposition of conductive materialAUTH NICOLE·Filed 2009·Granted Nov 27, 2012·0 cites·21 claims
- 1040US2014255831A1Method and apparatus for protecting a substrate during processing by a particle beamZEISS CARL SMS GMBH·Filed 2014·Application pending·0 cites
- 1132US11961705B2Method and apparatus for examining a beam of charged particlesHoinkis Elke·Filed 2020·Granted Apr 16, 2024·0 cites·39 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →