Inventor · disambiguated record
Peter Ten Berge
Also filed as: TEN BERGE PETER
23 granted patents·6 pending applications·42 citations·filing 2003–2023
93Inventor score
Files withASML NETHERLANDS BV29
Top patents by PatentIndex Score
29 records- 0191US11768441B2Method for controlling a manufacturing process and associated apparatusesASML NETHERLANDS BV·Filed 2021·Granted Sep 26, 2023·4 cites·20 claims
- 0290US10996176B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2020·Granted May 4, 2021·2 cites·19 claims
- 0389US10317191B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2017·Granted Jun 11, 2019·4 cites·21 claims
- 0489US7927090B2Imprint lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Apr 19, 2011·12 cites·14 claims
- 0585US10746668B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·2 cites·27 claims
- 0683US10996573B2Method and system for increasing accuracy of pattern positioningASML NETHERLANDS BV·Filed 2017·Granted May 4, 2021·2 cites·20 claims
- 0783US9594029B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2012·Granted Mar 14, 2017·4 cites·16 claims
- 0880US8887107B2Inspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2013·Granted Nov 11, 2014·2 cites·18 claims
- 0977US7349071B2Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 25, 2008·4 cites·19 claims
- 1076US11170072B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Nov 9, 2021·2 cites·21 claims
- 1174US11977034B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2021·Granted May 7, 2024·0 cites·18 claims
- 1274US11086229B2Method to predict yield of a device manufacturing processASML NETHERLANDS BV·Filed 2018·Granted Aug 10, 2021·1 cites·24 claims
- 1370US11714357B2Method to predict yield of a device manufacturing processASML NETHERLANDS BV·Filed 2021·Granted Aug 1, 2023·0 cites·20 claims
- 1470US10816907B2Method for determining an optimized set of measurement locations for measurement of a parameter of a lithographic process, metrology system and computer program products for implementing such methodsASML NETHERLANDS BV·Filed 2017·Granted Oct 27, 2020·1 cites·22 claims
- 1565US2024045340A1Method for controlling a manufacturing process and associated apparatusesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1661US12493248B2Method for optimizing a sampling scheme and associated apparatusesASML NETHERLANDS BV·Filed 2021·Granted Dec 9, 2025·0 cites·20 claims
- 1761US2022027437A1Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1855USRE49460EInspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2015·Granted Mar 14, 2023·0 cites·27 claims
- 1954USRE49199EInspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2015·Granted Sep 6, 2022·0 cites·27 claims
- 2050US2010060869A1Lithographic apparatus and alignment methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2148US11036146B2Method and apparatus to reduce effects of nonlinear behaviorASML NETHERLANDS BV·Filed 2016·Granted Jun 15, 2021·0 cites·21 claims
- 2248US7253077B2Substrate, method of preparing a substrate, method of measurement, lithographic apparatus, device manufacturing method and device manufactured thereby, and machine-readable storage mediumASML NETHERLANDS BV·Filed 2003·Granted Aug 7, 2007·2 cites·12 claims
- 2346US10719011B2Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Granted Jul 21, 2020·0 cites·20 claims
- 2445US7342642B2Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 11, 2008·0 cites·14 claims
- 2544US10915689B2Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Granted Feb 9, 2021·0 cites·21 claims
- 2643US2008117402A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 2742US10691863B2Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Granted Jun 23, 2020·0 cites·20 claims
- 2837US2018299770A1Method and apparatus to correct for patterning process errorASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
- 2934US2019214318A1Method and apparatus to monitor a process apparatusASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →