Inventor · disambiguated record
Peter C. Van Buskirk
Also filed as: BUSKIRK PETER C VAN · BUSKIRK PETER VAN · KIRLIN PETER S · VAN BUSKIRK PETER C
53 granted patents·5 pending applications·3,286 citations·filing 1994–2022
99Inventor score
Files withADVANCED TECH MATERIALS38ROEDER JEFFREY F6VAN BUSKIRK PETER C6PETRUSKA MELISSA A2ENTEGRIS INC1
Top patents by PatentIndex Score
58 records- 0198US5972430ADigital chemical vapor deposition (CVD) method for forming a multi-component oxide layerADVANCED TECH MATERIALS·Filed 1997·Granted Oct 26, 1999·417 cites·24 claims
- 0297US5976928AChemical mechanical polishing of FeRAM capacitorsADVANCED TECH MATERIALS·Filed 1997·Granted Nov 2, 1999·220 cites·69 claims
- 0397US5362328AApparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystemADVANCED TECH MATERIALS·Filed 1994·Granted Nov 8, 1994·417 cites·13 claims
- 0496US6346741B1Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using sameADVANCED TECH MATERIALS·Filed 1998·Granted Feb 12, 2002·224 cites·17 claims
- 0595US5719417AFerroelectric integrated circuit structureADVANCED TECH MATERIALS·Filed 1996·Granted Feb 17, 1998·154 cites·9 claims
- 0695US5711816ASource reagent liquid delivery apparatus, and chemical vapor deposition system comprising sameADVANCED TECH MATERIALS·Filed 1995·Granted Jan 27, 1998·316 cites·20 claims
- 0795US5705443AEtching method for refractory materialsADVANCED TECH MATERIALS·Filed 1995·Granted Jan 6, 1998·208 cites·26 claims
- 0894US5882416ALiquid delivery system, heater apparatus for liquid delivery system, and vaporizerADVANCED TECH MATERIALS·Filed 1997·Granted Mar 16, 1999·130 cites·38 claims
- 0993US9073028B2Liner-based liquid storage and dispensing systems with empty detection capabilityADVANCED TECH MATERIALS·Filed 2012·Granted Jul 7, 2015·18 cites·20 claims
- 1093US6100200ASputtering process for the conformal deposition of a metallization or insulating layerADVANCED TECH MATERIALS·Filed 1998·Granted Aug 8, 2000·133 cites·50 claims
- 1193US5876503AMultiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositionsADVANCED TECH MATERIALS·Filed 1996·Granted Mar 2, 1999·117 cites·10 claims
- 1292US8322571B2Liner-based liquid storage and dispensing systems with empty detection capabilityHOVINEN MINNA·Filed 2006·Granted Dec 4, 2012·39 cites·9 claims
- 1391US7951225B2Fluid storage and dispensing systems, and fluid supply processes comprising sameADVANCED TECH MATERIALS·Filed 2006·Granted May 31, 2011·22 cites·25 claims
- 1491US5653806AShowerhead-type discharge assembly for delivery of source reagent vapor to a substrate, and CVD process utilizing sameADVANCED TECH MATERIALS·Filed 1995·Granted Aug 5, 1997·105 cites·14 claims
- 1590US8282023B2Fluid storage and dispensing systems, and fluid supply processes comprising sameOLANDER W KARL·Filed 2011·Granted Oct 9, 2012·10 cites·22 claims
- 1690US6316797B1Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film materialADVANCED TECH MATERIALS·Filed 1999·Granted Nov 13, 2001·67 cites·37 claims
- 1789US7344589B2Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film materialADVANCED TECH MATERIALS·Filed 2006·Granted Mar 18, 2008·9 cites·13 claims
- 1889US6254792B1Isotropic dry cleaning process for noble metal integrated circuit structuresADVANCED TECH MATERIALS·Filed 1998·Granted Jul 3, 2001·78 cites·44 claims
- 1987US6284654B1Chemical vapor deposition process for fabrication of hybrid electrodesADVANCED TECH MATERIALS·Filed 1998·Granted Sep 4, 2001·74 cites·22 claims
- 2086US7705382B2Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film materialADVANCED TECH MATERIALS·Filed 2007·Granted Apr 27, 2010·6 cites·25 claims
- 2185US5741363AInteriorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor depositionADVANCED TECH MATERIALS·Filed 1996·Granted Apr 21, 1998·59 cites·18 claims
- 2284US5998236AProcess for controlled orientation of ferroelectric layersADVANCED TECH MATERIALS·Filed 1998·Granted Dec 7, 1999·59 cites·12 claims
- 2382US7862857B2Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film materialADVANCED TECH MATERIALS·Filed 2010·Granted Jan 4, 2011·3 cites·20 claims
- 2482US7005303B2Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devicesADVANCED TECH MATERIALS·Filed 2004·Granted Feb 28, 2006·27 cites·12 claims
- 2581US6395194B1Chemical mechanical polishing compositions, and process for the CMP removal of iridium thin using sameINTERSURFACE DYNAMICS INC·Filed 1998·Granted May 28, 2002·67 cites·6 claims
- 2680US6984417B2Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film materialADVANCED TECH MATERIALS·Filed 2001·Granted Jan 10, 2006·15 cites·27 claims
- 2779US6846424B2Plasma-assisted dry etching of noble metal-based materialsADVANCED TECH MATERIALS·Filed 2001·Granted Jan 25, 2005·24 cites·48 claims
- 2879US6709610B2Isotropic dry cleaning process for noble metal integrated circuit structuresADVANCED TECH MATERIALS·Filed 2001·Granted Mar 23, 2004·14 cites·17 claims
- 2979US6184550B1Ternary nitride-carbide barrier layersADVANCED TECH MATERIALS·Filed 1998·Granted Feb 6, 2001·54 cites·54 claims
- 3078US6010748AMethod of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injectorADVANCED TECH MATERIALS·Filed 1998·Granted Jan 4, 2000·40 cites·7 claims
- 3177US6730523B2Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devicesADVANCED TECH MATERIALS·Filed 2001·Granted May 4, 2004·17 cites·47 claims
- 3275US9802749B2Liner-based liquid storage and dispensing systems with empty detection capabilityENTEGRIS INC·Filed 2015·Granted Oct 31, 2017·1 cites·12 claims
- 3374US11052385B2Photocatalytic surface systemsVAN BUSKIRK PETER C·Filed 2018·Granted Jul 6, 2021·1 cites·20 claims
- 3471US10516169B2Apparatus and method for coating bulk quantities of solid particlesZEBEROFF ANTHONY F·Filed 2016·Granted Dec 24, 2019·1 cites·25 claims
- 3571US6699402B2Chemical mechanical polishing compositions for CMP removal of iridium thin filmsADVANCED TECH MATERIALS·Filed 2001·Granted Mar 2, 2004·14 cites·16 claims
- 3670US6511856B2Confinement of E-fields in high density ferroelectric memory device structuresADVANCED TECH MATERIALS·Filed 2001·Granted Jan 28, 2003·11 cites·12 claims
- 3769US6177135B1Low temperature CVD processes for preparing ferroelectric films using Bi amidesADVANCED TECH MATERIALS·Filed 1998·Granted Jan 23, 2001·34 cites·68 claims
- 3868US10541429B2SOFC interconnect barriers and methods of making same using masksROEDER JEFFREY F·Filed 2017·Granted Jan 21, 2020·0 cites·12 claims
- 3968US9480766B2Photocatalytic devices and systemsVAN BUSKIRK PETER C·Filed 2014·Granted Nov 1, 2016·1 cites·38 claims
- 4066US6303391B1Low temperature chemical vapor deposition process for forming bismuth-containing ceramic films useful in ferroelectric memory devicesADVANCED TECH MATERIALS·Filed 1997·Granted Oct 16, 2001·27 cites·14 claims
- 4164US10141582B2SOFC interconnect barriers and methods of making sameROEDER JEFFREY F·Filed 2015·Granted Nov 27, 2018·0 cites·17 claims
- 4262US11958765B2Combined VOC mitigating and antimicrobial systemsROEDER JEFFREY F·Filed 2022·Granted Apr 16, 2024·0 cites·30 claims
- 4361US11241671B2Monolithic composite photocatalystsPETRUSKA MELISSA A·Filed 2019·Granted Feb 8, 2022·0 cites·25 claims
- 4459US12042780B2Monolithic composite photocatalystsPETRUSKA MELISSA A·Filed 2021·Granted Jul 23, 2024·0 cites·15 claims
- 4559US7464192B2Programmable serial interface for a semiconductor circuitSILICON STORAGE TECH INC·Filed 2002·Granted Dec 9, 2008·7 cites·21 claims
- 4658US12083477B2Photocatalytic fluid purification systemsVAN BUSKIRK PETER C·Filed 2018·Granted Sep 10, 2024·0 cites·3 claims
- 4758US12035720B2Antimicrobial surface systemsROEDER JEFFREY F·Filed 2021·Granted Jul 16, 2024·0 cites·22 claims
- 4858US2013324390A1Scalable lead zirconium titanate (pzt) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film materialADVANCED TECH MATERIALS·Filed 2013·Application pending·0 cites
- 4957US2009248587A1Selectively negotiated ridershare system comprising riders, drivers, and vehiclesVAN BUSKIRK PETER C·Filed 2008·Application pending·0 cites
- 5056US11857924B2Photocatalytic fluidized bed reactor systemsVAN BUSKIRK PETER C·Filed 2020·Granted Jan 2, 2024·0 cites·24 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →