Inventor · disambiguated record
Petrus Franciscus Van Gils
Also filed as: VAN GILS PETRUS FRANCISCUS
11 granted patents·1 pending application·9 citations·filing 2011–2023
82Inventor score
Top patents by PatentIndex Score
12 records- 0184US11105619B2Measurement apparatusASML NETHERLANDS BV·Filed 2018·Granted Aug 31, 2021·3 cites·20 claims
- 0282US10401735B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 3, 2019·2 cites·18 claims
- 0374US2024151520A1Measurement apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0472US11307507B2Method to obtain a height map of a substrate having alignment marks, substrate alignment measuring apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Apr 19, 2022·2 cites·14 claims
- 0571US11874103B2Measurement apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 16, 2024·0 cites·20 claims
- 0664US9606457B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·2 cites·14 claims
- 0762US10747120B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·0 cites·19 claims
- 0851US10908517B2Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Feb 2, 2021·0 cites·15 claims
- 0950US12405542B2Method of determining a mark measurement sequence, stage apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Sep 2, 2025·0 cites·28 claims
- 1040US9116446B2Lithographic apparatus and methodVOOGD ROBBERT JAN·Filed 2011·Granted Aug 25, 2015·0 cites·18 claims
- 1134US10627721B2Lithography apparatus, and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·0 cites·23 claims
- 1230US10088756B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted Oct 2, 2018·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →