Inventor · disambiguated record
Philipp Huethwohl
Also filed as: HUETHWOHL PHILIPP
2 granted patents·6 pending applications·10 citations·filing 2019–2025
48Inventor score
Files withZEISS CARL SMT GMBH8
Top patents by PatentIndex Score
8 records- 0187US10901391B1Multi-scanning electron microscopy for wafer alignmentZEISS CARL SMT GMBH·Filed 2019·Granted Jan 26, 2021·10 cites·20 claims
- 0262US2025362253A13d volume inspection method and method of configuring of a 3d volume inspection methodZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0361US2024411296A1Computer implemented method for the detection and classification of anomalies in an imaging dataset of a wafer, and systems making use of such methodsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0452US11728130B2Method of recording an image using a particle microscopeZEISS CARL SMT GMBH·Filed 2021·Granted Aug 15, 2023·0 cites·26 claims
- 0552US2023260105A1Defect detection for semiconductor structures on a waferZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0651US2024281952A13d volume inspection method and method of configuring of a 3d volume inspection methodZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0744US2022044949A1Interactive and iterative training of a classification algorithm for classifying anomalies in imaging datasetsZEISS CARL SMT GMBH·Filed 2021·Application pending·0 cites
- 0838US2021073976A1Wafer inspection methods and systemsZEISS CARL SMT GMBH·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →