Inventor · disambiguated record
Phalguna Kumar Rachinayani
Also filed as: RACHINAYANI PHALGUNA · RACHINAYANI PHALGUNA KUMAR
1 granted patent·3 pending applications·0 citations·filing 2022–2025
4Inventor score
Technology areasH10P
Files withKLA CORP4
Top patents by PatentIndex Score
4 records- 0150US2024162074A1Methods And Systems For Measurement Of Semiconductor Structures With Active Tilt CorrectionKLA CORP·Filed 2023·Application pending·0 cites
- 0250US2025118602A1Metrology system with twin planar motor stageKLA CORP·Filed 2024·Application pending·0 cites
- 0346US12148639B2Correcting target locations for temperature in semiconductor applicationsKLA CORP·Filed 2022·Granted Nov 19, 2024·0 cites·24 claims
- 0446US2025285901A1Methods And Systems For Robust, Automated Tuning Of Feedforward Motion Control ParametersKLA CORP·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →