Inventor · disambiguated record
Philip D. Schumaker
Also filed as: SCHUMAKER PHILIP D
23 granted patents·10 pending applications·351 citations·filing 2000–2017
96Inventor score
Files withMOLECULAR IMPRINTS INC18CANON KK5SCHUMAKER PHILIP D3SREENIVASAN SIDLGATA V2CANON NANOTECHNOLOGIES INC1
Top patents by PatentIndex Score
33 records- 0195US7136150B2Imprint lithography template having opaque alignment marksMOLECULAR IMPRINTS INC·Filed 2003·Granted Nov 14, 2006·66 cites·20 claims
- 0294US8850980B2Tessellated patterns in imprint lithographySREENIVASAN SIDLGATA V·Filed 2007·Granted Oct 7, 2014·23 cites·7 claims
- 0392US8586126B2Robust optimization to generate drop patterns in imprint lithography which are tolerant of variations in drop volume and drop placementSCHUMAKER PHILIP D·Filed 2009·Granted Nov 19, 2013·19 cites·8 claims
- 0491US8432548B2Alignment for edge field nano-imprintingCHOI BYUNG-JIN·Filed 2009·Granted Apr 30, 2013·13 cites·17 claims
- 0591US7292326B2Interferometric analysis for the manufacture of nano-scale devicesMOLECULAR IMPRINTS INC·Filed 2004·Granted Nov 6, 2007·47 cites·23 claims
- 0689US9090014B2High throughput imprint based on contact line motion tracking controlCANON NANOTECHNOLOGIES INC·Filed 2015·Granted Jul 28, 2015·7 cites·14 claims
- 0789US8142850B2Patterning a plurality of fields on a substrate to compensate for differing evaporation timesSREENIVASAN SIDLGATA V·Filed 2007·Granted Mar 27, 2012·13 cites·21 claims
- 0889US8119052B2Drop pattern generation for imprint lithographySCHUMAKER PHILIP D·Filed 2008·Granted Feb 21, 2012·23 cites·14 claims
- 0988US8647554B2Residual layer thickness measurement and correctionJONES CHRISTOPHER ELLIS·Filed 2010·Granted Feb 11, 2014·11 cites·20 claims
- 1088US7854867B2Method for detecting a particle in a nanoimprint lithography systemMOLECULAR IMPRINTS INC·Filed 2007·Granted Dec 21, 2010·10 cites·11 claims
- 1188US6978229B1Efficient method for modeling and simulation of the impact of local and global variation on integrated circuitsPDF SOLUTIONS INC·Filed 2000·Granted Dec 20, 2005·53 cites·6 claims
- 1285US8512797B2Drop pattern generation with edge weightingSCHUMAKER PHILIP D·Filed 2009·Granted Aug 20, 2013·11 cites·8 claims
- 1383US10120276B2Imprint apparatus, imprint method, and method of manufacturing articleCANON KK·Filed 2015·Granted Nov 6, 2018·3 cites·15 claims
- 1482US7630067B2Interferometric analysis method for the manufacture of nano-scale devicesMOLECULAR IMPRINTS INC·Filed 2004·Granted Dec 8, 2009·18 cites·12 claims
- 1581US7665981B2System to transfer a template transfer body between a motion stage and a docking plateMOLECULAR IMPRINTS INC·Filed 2005·Granted Feb 23, 2010·9 cites·23 claims
- 1679US10248018B2Imprint apparatus and method of manufacturing articleCANON KK·Filed 2015·Granted Apr 2, 2019·2 cites·14 claims
- 1779US8945444B2High throughput imprint based on contact line motion tracking controlLU XIAOMING·Filed 2008·Granted Feb 3, 2015·7 cites·12 claims
- 1878US7880872B2Interferometric analysis method for the manufacture of nano-scale devicesMOLECULAR IMPRINTS INC·Filed 2009·Granted Feb 1, 2011·8 cites·20 claims
- 1975US7785096B2Enhanced multi channel alignmentMOLECULAR IMPRINTS INC·Filed 2009·Granted Aug 31, 2010·3 cites·19 claims
- 2074US10654216B2System and methods for nanoimprint lithographyCANON KK·Filed 2016·Granted May 19, 2020·1 cites·8 claims
- 2172US8345242B2Optical system for use in stage controlMOLECULAR IMPRINTS INC·Filed 2009·Granted Jan 1, 2013·4 cites·9 claims
- 2252US2010104747A1Drop Deposition ControlMOLECULAR IMPRINTS INC·Filed 2009·Application pending·0 cites
- 2352US2007228593A1Residual Layer Thickness Measurement and CorrectionMOLECULAR IMPRINTS INC·Filed 2007·Application pending·0 cites
- 2451US2007231421A1Enhanced Multi Channel AlignmentMOLECULAR IMPRINTS INC·Filed 2007·Application pending·0 cites
- 2549US2010112220A1Dispense system set-up and characterizationMOLECULAR IMPRINTS INC·Filed 2009·Application pending·0 cites
- 2649US2009014917A1Drop Pattern Generation for Imprint LithographyMOLECULAR IMPRINTS INC·Filed 2008·Application pending·0 cites
- 2745US2007064384A1Method to transfer a template transfer body between a motion stage and a docking plateMOLECULAR IMPRINTS INC·Filed 2005·Application pending·0 cites
- 2843US10416576B2Optical system for use in stage controlCANON KK·Filed 2016·Granted Sep 17, 2019·0 cites·6 claims
- 2943US2009148032A1Alignment Using Moire PatternsMOLECULAR IMPRINTS INC·Filed 2008·Application pending·0 cites
- 3043US2009147237A1Spatial Phase Feature LocationMOLECULAR IMPRINTS INC·Filed 2008·Application pending·0 cites
- 3142US2007074635A1System to couple a body and a docking plateMOLECULAR IMPRINTS INC·Filed 2005·Application pending·0 cites
- 3241US10996561B2Nanoimprint lithography with a six degrees-of-freedom imprint head moduleCANON KK·Filed 2017·Granted May 4, 2021·0 cites·17 claims
- 3340US2005270312A1Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →