Inventor · disambiguated record
Phillip Spaull
Also filed as: SPAULL PHILLIP
1 granted patent·4 pending applications·7 citations·filing 2000–2004
29Inventor score
Files withTOKYO ELECTRON LTD1
Top patents by PatentIndex Score
5 records- 0155US6925731B2Thin film forming apparatus cleaning methodTOKYO ELECTRON LTD·Filed 2002·Granted Aug 9, 2005·7 cites·22 claims
- 0246US2004163677A1Heat treatment apparatus and cleaning method of the sameFiled 2004·Application pending·0 cites
- 0341US2001055738A1Heat treatment apparatus and cleaning method of the sameFiled 2001·Application pending·0 cites
- 0432US2003034053A1Processing and cleaning methodFiled 2000·Application pending·0 cites
- 0531US2002011465A1Etching method, processing apparatus and etching apparatusFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →