Inventor · disambiguated record
Pil Kyun Heo
Also filed as: HEO PIL KYUN
13 granted patents·10 pending applications·3 citations·filing 2013–2024
82Inventor score
Top patents by PatentIndex Score
23 records- 0186US11804371B2Substrate treatment apparatus and method of performing treatment process on substrateSEMES CO LTD·Filed 2020·Granted Oct 31, 2023·2 cites·19 claims
- 0278US11495467B2Method and apparatus for etching thin layerSEMES CO LTD·Filed 2020·Granted Nov 8, 2022·1 cites·20 claims
- 0372US12300519B2Surface treatment methodSEMES CO LTD·Filed 2023·Granted May 13, 2025·0 cites·5 claims
- 0462US12046466B2Method and apparatus for treating substrateSEMES CO LTD·Filed 2022·Granted Jul 23, 2024·0 cites·13 claims
- 0562US11764084B2Surface treatment apparatus and surface treatment methodSEMES CO LTD·Filed 2020·Granted Sep 19, 2023·0 cites·9 claims
- 0660US11940734B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2022·Granted Mar 26, 2024·0 cites·19 claims
- 0760US2025079197A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0859US2025218739A1Substrate processing apparatus, substrate processing method, and manufacturing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0958US12337356B2Moving assembly for recovery guard and substrate processing apparatusSEMES CO LTD·Filed 2023·Granted Jun 24, 2025·0 cites·20 claims
- 1055US12463086B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 1155US2025034719A1Apparatus and method of treating substrateSEMES CO LTD·Filed 2024·Application pending·0 cites
- 1254US2023350304A1Apparatus and method for processing substrateSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1353US11682577B2Spin head, apparatus and method for treating a substrate including the spin headSEMES CO LTD·Filed 2020·Granted Jun 20, 2023·0 cites·21 claims
- 1453US2021050210A1Method and apparatus for treating substrateSEMES CO LTD·Filed 2020·Application pending·0 cites
- 1552US11923216B2Apparatus and method for treating substrate including process chambers and transfer chamberSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·19 claims
- 1650US12094733B2Substrate treatment apparatusSEMES CO LTD·Filed 2020·Granted Sep 17, 2024·0 cites·20 claims
- 1750US11887883B2Heterogeneous composite material and method for producing the sameSEMES CO LTD·Filed 2021·Granted Jan 30, 2024·0 cites·19 claims
- 1849US12429283B2Method and apparatus for treating a substrateSEMES CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·10 claims
- 1949US2023338993A1Apparatus for heating chemical liquid and system for treating substrate including the sameSEMES CO LTD·Filed 2022·Application pending·0 cites
- 2043US2017140975A1Spin head, apparatus and method for treating a substrate including the spin headSEMES CO LTD·Filed 2016·Application pending·0 cites
- 2141US2021134617A1Substrate treatment apparatusSEMES CO LTD·Filed 2020·Application pending·0 cites
- 2236US2013319484A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2013·Application pending·0 cites
- 2334US2018005849A1Substrate treating apparatusSEMES CO LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →