Inventor · disambiguated record
Pieter Kruit
Also filed as: KRUIT PIETER
91 granted patents·18 pending applications·1,405 citations·filing 1982–2025
99Inventor score
Files withMAPPER LITHOGRAPHY IP BV27UNIV DELFT TECH13KRUIT PIETER9PHILIPS CORP8ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH6
Top patents by PatentIndex Score
109 records- 0199US9922796B1Method for inspecting a specimen and charged particle multi-beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Mar 20, 2018·55 cites·29 claims
- 0299US7129502B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2004·Granted Oct 31, 2006·162 cites·30 claims
- 0398US7091504B2Electron beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2005·Granted Aug 15, 2006·50 cites·36 claims
- 0498US6897458B2Electron beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted May 24, 2005·144 cites·36 claims
- 0597US6633366B2Lithographic apparatus, device manufacturing method, and device manufactured therebyFiled 2001·Granted Oct 14, 2003·76 cites·49 claims
- 0696US8134135B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2007·Granted Mar 13, 2012·43 cites·43 claims
- 0796US8089056B2Projection lens arrangementWIELAND MARCO JAN JACO·Filed 2009·Granted Jan 3, 2012·29 cites·20 claims
- 0896US6958804B2Lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted Oct 25, 2005·135 cites·41 claims
- 0995US7084414B2Charged particle beamlet exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2004·Granted Aug 1, 2006·118 cites·23 claims
- 1095US6333508B1Illumination system for electron beam lithography toolLUCENT TECHNOLOGIES INC·Filed 2000·Granted Dec 25, 2001·81 cites·40 claims
- 1194US10453645B2Method for inspecting a specimen and charged particle multi-beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Oct 22, 2019·9 cites·20 claims
- 1294US8294117B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2010·Granted Oct 23, 2012·27 cites·32 claims
- 1394US7868300B2Lithography system, sensor and measuring methodMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Jan 11, 2011·30 cites·37 claims
- 1493US7842936B2Lithography system and projection methodMAPPER LITHOGRAPHY IP BV·Filed 2007·Granted Nov 30, 2010·20 cites·15 claims
- 1593US7569833B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Aug 4, 2009·13 cites·17 claims
- 1691US10312052B2Multi electron beam inspection apparatusUNIV DELFT TECH·Filed 2015·Granted Jun 4, 2019·7 cites·31 claims
- 1791US6919952B2Direct write lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted Jul 19, 2005·33 cites·20 claims
- 1889US7391037B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Jun 24, 2008·7 cites·32 claims
- 1989US7365338B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Apr 29, 2008·8 cites·5 claims
- 2088US9665013B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 30, 2017·4 cites·19 claims
- 2187US10504687B2Signal separator for a multi-beam charged particle inspection apparatusUNIV DELFT TECH·Filed 2018·Granted Dec 10, 2019·4 cites·24 claims
- 2287US7348567B1Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Mar 25, 2008·6 cites·22 claims
- 2386US9607806B2Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beamsZONNEVYLLE AERNOUT CHRISTIAAN·Filed 2012·Granted Mar 28, 2017·13 cites·40 claims
- 2485US7732762B2Method of inspecting a specimen surface, apparatus and use of fluorescent materialTNO·Filed 2005·Granted Jun 8, 2010·11 cites·47 claims
- 2585US2025308835A1Method for inspecting a specimen and charged particle beam deviceAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2685US2025308836A1Method for inspecting a specimen and charged particle beam deviceAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2784US8890094B2Projection lens arrangementMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Nov 18, 2014·6 cites·19 claims
- 2884US8610093B2Direct write lithography systemKRUIT PIETER·Filed 2012·Granted Dec 17, 2013·3 cites·24 claims
- 2983US8598545B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2012·Granted Dec 3, 2013·4 cites·11 claims
- 3083US7772564B2Particle-optical apparatus equipped with a gas ion sourceFEI CO·Filed 2007·Granted Aug 10, 2010·13 cites·29 claims
- 3182US8188450B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2011·Granted May 29, 2012·4 cites·23 claims
- 3282US7173263B2Optical switching in lithography systemMAPPER LIGHOGRAPHY IP B V·Filed 2005·Granted Feb 6, 2007·9 cites·25 claims
- 3381US10651009B2Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscopeDELMIC B V·Filed 2015·Granted May 12, 2020·4 cites·34 claims
- 3481US8569712B2Beam blanker for interrupting a beam of charged particlesKNIPPELS GUIDO MARTINUS HENRICUS·Filed 2011·Granted Oct 29, 2013·10 cites·23 claims
- 3580US7612866B2Lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2007·Granted Nov 3, 2009·5 cites·25 claims
- 3680US7453075B2Charged particle beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2005·Granted Nov 18, 2008·4 cites·23 claims
- 3780US4500787AMethod and a device for furnishing an ion streamTNO·Filed 1982·Granted Feb 19, 1985·20 cites·8 claims
- 3879US4882486AElectron detection with energy discriminationPHILIPS CORP·Filed 1989·Granted Nov 21, 1989·22 cites·29 claims
- 3978USRE48046ELithography system, sensor and measuring methodASML NETHERLANDS BV·Filed 2014·Granted Jun 9, 2020·2 cites·57 claims
- 4078US7868307B2Charged particle beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2008·Granted Jan 11, 2011·5 cites·11 claims
- 4178US5578822AParticle-optical apparatus comprising a detector for secondary electronsPHILIPS CORP·Filed 1995·Granted Nov 26, 1996·34 cites·7 claims
- 4277US9449789B2Apparatus and method for inspecting a surface of a sampleUNIV DELFT TECH·Filed 2013·Granted Sep 20, 2016·3 cites·27 claims
- 4376US6335783B1Lithography systemUNIV DELFT TECH·Filed 1998·Granted Jan 1, 2002·36 cites·18 claims
- 4475US10453649B2Apparatus and method for inspecting a sample using a plurality of charged particle beamsUNIV DELFT TECH·Filed 2015·Granted Oct 22, 2019·2 cites·15 claims
- 4575US7019312B2Adjustment in a MAPPER systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted Mar 28, 2006·10 cites·58 claims
- 4674US11961709B2Charged particle beam device for inspection of a specimen with a plurality of charged particle beamletsFEI CO·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
- 4774US9378921B2Integrated optical and charged particle inspection apparatusDELMIC B V·Filed 2013·Granted Jun 28, 2016·4 cites·18 claims
- 4874US8895921B2Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatusKRUIT PIETER·Filed 2011·Granted Nov 25, 2014·3 cites·17 claims
- 4974US8648318B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2011·Granted Feb 11, 2014·2 cites·10 claims
- 5073US5587586AParticle-optical apparatus comprising an electron source with a needle and a membrane-like extraction electrodePHILIPS CORP·Filed 1995·Granted Dec 24, 1996·25 cites·17 claims
Showing the top 50 of 109 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →