Inventor · disambiguated record

Prashant Gadgil

Also filed as: GADGIL PRASHANT

3 granted patents·346 citations·filing 1996–1999

79Inventor score

Technology areasH10P

Files withLAM RES CORP3

Top patents by PatentIndex Score

3 records

0194US6241845B1Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layerLAM RES CORP·Filed 1999·Granted Jun 5, 2001·249 cites·15 claims
0280US6048798AApparatus for reducing process drift in inductive coupled plasma etching such as oxide layerLAM RES CORP·Filed 1996·Granted Apr 11, 2000·64 cites·20 claims
0364US5783496AMethods and apparatus for etching self-aligned contactsLAM RES CORP·Filed 1996·Granted Jul 21, 1998·33 cites·21 claims

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