Inventor · disambiguated record
Prabhakara Gopaladasu
Also filed as: GOPALADASU PRABHAKARA
6 granted patents·2 pending applications·9 citations·filing 2006–2022
73Inventor score
Top patents by PatentIndex Score
8 records- 0181US10037890B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2016·Granted Jul 31, 2018·3 cites·18 claims
- 0271US10361091B2Porous low-k dielectric etchLAM RES CORP·Filed 2017·Granted Jul 23, 2019·2 cites·17 claims
- 0371US8283255B2In-situ photoresist strip during plasma etching of active hard maskCHO SANGJUN·Filed 2007·Granted Oct 9, 2012·4 cites·18 claims
- 0453US10541141B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2018·Granted Jan 21, 2020·0 cites·20 claims
- 0551US2023268192A1In-situ hydrocarbon-based layer for non-conformal passivation of partially etched structuresLAM RES CORP·Filed 2022·Application pending·0 cites
- 0645US8912633B2In-situ photoresist strip during plasma etching of active hard maskCHO SANGJUN·Filed 2012·Granted Dec 16, 2014·0 cites·20 claims
- 0741US2008064214A1Semiconductor processing including etched layer passivation using self-assembled monolayerLAM RES CORP·Filed 2006·Application pending·0 cites
- 0839US10002773B2Method for selectively etching silicon oxide with respect to an organic maskLAM RES CORP·Filed 2016·Granted Jun 19, 2018·0 cites·18 claims
Join the waitlist — get patent alerts
Get an alert when Prabhakara Gopaladasu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →