Inventor · disambiguated record
Premlatha Jagannathan
Also filed as: JAGANNATHAN PREMLATHA · JAGANNATHAN PREMLATHA J
7 granted patents·172 citations·filing 1991–1999
87Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0183US5338818ASilicon containing positive resist for DUV lithographyIBM·Filed 1992·Granted Aug 16, 1994·44 cites·4 claims
- 0283US5296332ACrosslinkable aqueous developable photoresist compositions and method for use thereofIBM·Filed 1991·Granted Mar 22, 1994·49 cites·24 claims
- 0377US5399462AMethod of forming sub-half micron patterns with optical lithography using bilayer resist compositions comprising a photosensitive polysilsesquioxaneIBM·Filed 1994·Granted Mar 21, 1995·33 cites·11 claims
- 0454US6074800APhoto acid generator compounds, photo resists, and method for improving biasIBM·Filed 1998·Granted Jun 13, 2000·16 cites·9 claims
- 0553US6136498APolymer-bound sensitizerIBM·Filed 1996·Granted Oct 24, 2000·19 cites·4 claims
- 0635US6303416B1Method to reduce plasma etch flutingIBM·Filed 1999·Granted Oct 16, 2001·8 cites·6 claims
- 0733US6383712B1Polymer-bound sensitizerIBM·Filed 1998·Granted May 7, 2002·3 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →