Inventor · disambiguated record
Premkumar Panneerchelvam
Also filed as: PANNEERCHELVAM PREMKUMAR
2 granted patents·1 pending application·0 citations·filing 2020–2022
21Inventor score
Files withKLA CORP3
Top patents by PatentIndex Score
3 records- 0149US11868689B2Systems and methods for setting up a physics-based modelKLA CORP·Filed 2022·Granted Jan 9, 2024·0 cites·19 claims
- 0248US2024120186A1Plasma hypermodel integrated with feature-scale profile model for accelerated etch process developmentKLA CORP·Filed 2022·Application pending·0 cites
- 0336US11966203B2System and method to adjust a kinetics model of surface reactions during plasma processingKLA CORP·Filed 2020·Granted Apr 23, 2024·0 cites·43 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →