Inventor · disambiguated record

Pui Leng Lam

Also filed as: LAM PUI LENG

1 granted patent·1 pending application·25 citations·filing 2004–2020

42Inventor score

Technology areasG03B G03F

Files withASML NETHERLANDS BV2

Top patents by PatentIndex Score

2 records

0182US7259828B2Alignment system and method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Aug 21, 2007·25 cites·40 claims
0243US2022291593A1Method and apparatus for lithographic process performance determinationASML NETHERLANDS BV·Filed 2020·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →