Inventor · disambiguated record
Putra Saputra
Also filed as: SAPUTRA PUTRA
3 granted patents·2 pending applications·0 citations·filing 2015–2022
46Inventor score
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0157US11662666B2Sub-field control of a lithographic process and associated apparatusASML NETHERLANDS BV·Filed 2020·Granted May 30, 2023·0 cites·20 claims
- 0251US9939738B2Lithographic apparatus and an object positioning systemASML NETHERLANDS BV·Filed 2015·Granted Apr 10, 2018·0 cites·20 claims
- 0350USRE49142ELithographic apparatus and an object positioning systemASML NETHERLANDS BV·Filed 2015·Granted Jul 19, 2022·0 cites·24 claims
- 0442US2024094640A1Method to predict metrology offset of a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0540US2022244649A1Sub-field control of a lithographic process and associated apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →