Inventor · disambiguated record
Qiaowei Lou
Also filed as: LOU QIAOWEI
3 granted patents·2 pending applications·2 citations·filing 2019–2024
54Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0193US11915931B2Extreme ultraviolet lithography patterning methodTOKYO ELECTRON LTD·Filed 2021·Granted Feb 27, 2024·2 cites·20 claims
- 0283US12494369B2Extreme ultraviolet lithography patterning methodTOKYO ELECTRON LTD·Filed 2024·Granted Dec 9, 2025·0 cites·20 claims
- 0352US11658038B2Method for dry etching silicon carbide films for resist underlayer applicationsTOKYO ELECTRON LTD·Filed 2021·Granted May 23, 2023·0 cites·20 claims
- 0445US2022037152A1Plasma Pre-Treatment Method To Improve Etch Selectivity And Defectivity MarginTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0541US2021020448A1Method and Structure for Smoothing Substrate Patterns or SurfacesTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →