Inventor · disambiguated record
Qing She
Also filed as: She qing
5 granted patents·2 pending applications·6 citations·filing 2014–2022
66Inventor score
Top patents by PatentIndex Score
7 records- 0181US10622224B2Precleaning chamber and plasma processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2015·Granted Apr 14, 2020·4 cites·18 claims
- 0262US9978570B2Reaction chamber and semi-conductor processing deviceBEIJING NMC CO LTD·Filed 2014·Granted May 22, 2018·2 cites·12 claims
- 0348US12431376B2Semiconductor process chamber, semiconductor process equipment, and semiconductor process methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·11 claims
- 0448US11282682B2Magnetron drive mechanism, magnetron assembly and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Mar 22, 2022·0 cites·18 claims
- 0548US2025046647A1Semiconductor process device and wafer support structure thereofBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 0645US12278123B2Semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted Apr 15, 2025·0 cites·11 claims
- 0730US2016148789A1Pre-cleaning chamber and a semiconductor processing apparatus containing the sameBEIJING NMC CO LTD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →