Inventor · disambiguated record
Quan Chau
Also filed as: CHAU QUAN
3 granted patents·17 citations·filing 2009–2021
58Inventor score
Top patents by PatentIndex Score
3 records- 0188US9412555B2Lower electrode assembly of plasma processing chamberAUGUSTINO JASON·Filed 2009·Granted Aug 9, 2016·17 cites·12 claims
- 0257US12500069B2Method of mounting wires to substrate support ceramicLAM RES CORP·Filed 2021·Granted Dec 16, 2025·0 cites·22 claims
- 0334US9805963B2Electrostatic chuck with thermal chokeLAM RES CORP·Filed 2015·Granted Oct 31, 2017·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →