Inventor · disambiguated record
Quyen Pham
Also filed as: PHAM QUYEN · PHAM QUYEN D
6 granted patents·3 pending applications·790 citations·filing 1997–2010
87Inventor score
Files withAPPLIED MATERIALS INC8
Top patents by PatentIndex Score
9 records- 0198US6271148B1Method for improved remote microwave plasma source for use with substrate processing systemAPPLIED MATERIALS INC·Filed 1999·Granted Aug 7, 2001·647 cites·26 claims
- 0287US6592817B1Monitoring an effluent from a chamberAPPLIED MATERIALS INC·Filed 2000·Granted Jul 15, 2003·59 cites·44 claims
- 0381US6026762AApparatus for improved remote microwave plasma source for use with substrate processing systemsAPPLIED MATERIALS INC·Filed 1997·Granted Feb 22, 2000·54 cites·28 claims
- 0479US7355394B2Apparatus and method of dynamically measuring thickness of a layer of a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 8, 2008·9 cites·17 claims
- 0578US7112961B2Method and apparatus for dynamically measuring the thickness of an objectAPPLIED MATERIALS INC·Filed 2003·Granted Sep 26, 2006·18 cites·45 claims
- 0663US7777483B2Method and apparatus for measuring a thickness of a layer of a waferAPPLIED MATERIALS INC·Filed 2008·Granted Aug 17, 2010·3 cites·19 claims
- 0743US2004069651A1Oxide treatment and pressure control for electrodepositionAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 0837US2011064545A1Substrate transfer mechanism with preheating featuresAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 0935US2001042513A1Apparatus for improved remote microwave plasma source for use with substrate processing systemsFiled 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Quyen Pham files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →