Inventor · disambiguated record
Quanyu Shi
Also filed as: SHI QUANYU
5 granted patents·16 citations·filing 2018–2021
69Inventor score
Top patents by PatentIndex Score
5 records- 0185USD984972SElectrostatic chuck for semiconductor manufactureBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted May 2, 2023·14 cites·1 claims
- 0272US11282735B2Electrostatic chuck and semiconductor equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Mar 22, 2022·2 cites·20 claims
- 0354US11408064B2Mask structure and FCVA apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·20 claims
- 0445US11837491B2Electrostatic chuck and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Dec 5, 2023·0 cites·20 claims
- 0542US11309208B2Electrostatic chuck and method for manufacturing protrusions thereofBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Apr 19, 2022·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →