Inventor · disambiguated record
Rahul Ahlawat
Also filed as: AHLAWAT RAHUL
11 granted patents·17 citations·filing 2014–2020
83Inventor score
Files withCymer LLC11
Top patents by PatentIndex Score
11 records- 0187US9819136B2Gas mixture control in a gas discharge light sourceCymer LLC·Filed 2016·Granted Nov 14, 2017·5 cites·37 claims
- 0286US9261794B1Compensation for a disturbance in an optical sourceCymer LLC·Filed 2014·Granted Feb 16, 2016·9 cites·31 claims
- 0376US11803126B2Method of compensating wavelength error induced by repetition rate deviationCymer LLC·Filed 2020·Granted Oct 31, 2023·1 cites·18 claims
- 0466US9785050B2Pulsed light beam spectral feature controlCymer LLC·Filed 2015·Granted Oct 10, 2017·1 cites·32 claims
- 0560US12438334B2Apparatus for and method of modulating a light source wavelengthCymer LLC·Filed 2020·Granted Oct 7, 2025·0 cites·21 claims
- 0659US10816905B2Wavelength stabilization for an optical sourceCymer LLC·Filed 2015·Granted Oct 27, 2020·1 cites·30 claims
- 0754US9772556B2Pulsed light beam spectral feature controlCymer LLC·Filed 2017·Granted Sep 26, 2017·0 cites·20 claims
- 0853US11754541B2Fluorine detection in a gas discharge light sourceCymer LLC·Filed 2018·Granted Sep 12, 2023·0 cites·12 claims
- 0953US10090629B2Gas mixture control in a gas discharge light sourceCymer LLC·Filed 2017·Granted Oct 2, 2018·0 cites·25 claims
- 1051US9634460B2Compensation for a disturbance in an optical sourceCymer LLC·Filed 2016·Granted Apr 25, 2017·0 cites·22 claims
- 1147US10096967B2Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light sourceCymer LLC·Filed 2016·Granted Oct 9, 2018·0 cites·23 claims
Join the waitlist — get patent alerts
Get an alert when Rahul Ahlawat files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →