Inventor · disambiguated record
Ray Chuang
Also filed as: CHUANG RAY · CHUANG RAY F
7 granted patents·6 pending applications·61 citations·filing 1983–2006
83Inventor score
Top patents by PatentIndex Score
13 records- 0187US7432192B2Post ECP multi-step anneal/H2 treatment to reduce film impurityTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Oct 7, 2008·11 cites·20 claims
- 0281US7030016B2Post ECP multi-step anneal/H2 treatment to reduce film impurityTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 18, 2006·22 cites·37 claims
- 0361US7183199B2Method of reducing the pattern effect in the CMP processTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Feb 27, 2007·10 cites·7 claims
- 0458US7208404B2Method to reduce Rs pattern dependence effectTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Apr 24, 2007·9 cites·20 claims
- 0545US7667835B2Apparatus and method for preventing copper peeling in ECPTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Feb 23, 2010·0 cites·15 claims
- 0645US2008067076A1Method of reducing oxygen content in ECP solutionTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 0745US2006196765A1Metallization target optimization method providing enhanced metallization layer uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 0840US2006219566A1Method for fabricating metal layerTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 0939US2007006405A1Systems and methods for wafer cleaningTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 1038US4649609AApparatus and process for providing an alternate coolant path in the core of a nuclear reactorWESTINGHOUSE ELECTRIC CORP·Filed 1983·Granted Mar 17, 1987·8 cites·40 claims
- 1138US2005121329A1Thrust pad assembly for ECP systemTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 1238US2006213778A1Method for electrochemical plating on semiconductor wafersTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 1332US7102871B2Electrostatic chuck assembly having disassembling deviceTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Sep 5, 2006·1 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →