Inventor · disambiguated record
Rajesh Dorai
Also filed as: DORAI RAJESH
12 granted patents·9 pending applications·58 citations·filing 2004–2024
88Inventor score
Top patents by PatentIndex Score
21 records- 0183US8664561B2System and method for selectively controlling ion composition of ion sourcesHADIDI KAMAL·Filed 2009·Granted Mar 4, 2014·7 cites·22 claims
- 0283US7812321B2Techniques for providing a multimode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Oct 12, 2010·9 cites·12 claims
- 0382US7655922B2Techniques for confining electrons in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Feb 2, 2010·9 cites·19 claims
- 0480US7767986B2Method and apparatus for controlling beam current uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 3, 2010·5 cites·19 claims
- 0579US8692468B2Transformer-coupled RF source for plasma processing toolHADIDI KAMAL·Filed 2011·Granted Apr 8, 2014·4 cites·13 claims
- 0676US7132672B2Faraday dose and uniformity monitor for plasma based ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Nov 7, 2006·21 cites·37 claims
- 0775US2025043425A1Showerhead faceplates with angled gas distribution passages for semiconductor processing toolsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0869US8003498B2Particle beam assisted modification of thin film materialsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 23, 2011·3 cites·34 claims
- 0963US12139791B2Showerhead faceplates with angled gas distribution passages for semiconductor processing toolsLAM RES CORP·Filed 2021·Granted Nov 12, 2024·0 cites·19 claims
- 1056US2024420929A1Extreme edge feature profile tilt control by altering input voltage waveform to edge ringLAM RES CORP·Filed 2022·Application pending·0 cites
- 1154US2025239434A1Plasma systems and methods for using square-shaped pulse signalsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1253US2008317968A1Tilted plasma dopingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
- 1349US9704528B2Apparatus and method for improved perpendicular recording medium using ion implantation in a magnetic fieldVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Jul 11, 2017·0 cites·12 claims
- 1449US8830616B2Magnetic storage deviceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Sep 9, 2014·0 cites·19 claims
- 1549US7667208B2Technique for confining secondary electrons in plasma-based ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Feb 23, 2010·0 cites·18 claims
- 1646US2023133798A1Cooled edge ring with integrated sealsLAM RES CORP·Filed 2021·Application pending·0 cites
- 1746US2006236931A1Tilted Plasma DopingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Application pending·0 cites
- 1843US2014272181A1Apparatus and method for ion implantation in a magnetic fieldVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Application pending·0 cites
- 1939US2012256614A1Technique for limiting fault current transmissionSINCLAIR FRANK·Filed 2012·Application pending·0 cites
- 2036US10854492B2Edge ring assembly for improving feature profile tilting at extreme edge of waferLAM RES CORP·Filed 2016·Granted Dec 1, 2020·0 cites·18 claims
- 2136US2012000606A1Plasma uniformity system and methodDORAI RAJESH·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →