Inventor · disambiguated record
Rafal Dylewicz
Also filed as: DYLEWICZ RAFAL · DYLEWICZ RAFAL RYSZARD
4 granted patents·1 pending application·4 citations·filing 2014–2023
63Inventor score
Technology areasH10P
Files withLAM RES AG5
Top patents by PatentIndex Score
5 records- 0177US11195730B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2019·Granted Dec 7, 2021·2 cites·10 claims
- 0269US11823892B2Gas mixture including hydrogen fluoride, alcohol and an additive for preventing stiction of and/or repairing high aspect ratio structuresLAM RES AG·Filed 2019·Granted Nov 21, 2023·1 cites·24 claims
- 0366US2024038526A1Gas mixture including hydrogen fluoride, alcohol and an additive for preventing stiction of and/or repairing high aspect ratio structuresLAM RES AG·Filed 2023·Application pending·0 cites
- 0461US10490426B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2014·Granted Nov 26, 2019·1 cites·29 claims
- 0533US10483010B2Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environmentLAM RES AG·Filed 2016·Granted Nov 19, 2019·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →