Inventor · disambiguated record
Ralf Gehrke
Also filed as: GEHRKE RALF
3 granted patents·1 pending application·1 citations·filing 2017–2021
49Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0172US10078267B2Method for predicting at least one illumination parameter for evaluating an illumination settingZEISS CARL SMT GMBH·Filed 2017·Granted Sep 18, 2018·1 cites·20 claims
- 0257US10394128B2Method for predicting at least one illumination parameter for evaluating an illumination settingZEISS CARL SMT GMBH·Filed 2018·Granted Aug 27, 2019·0 cites·20 claims
- 0349US2022057709A1Method for approximating imaging properties of an optical production system to those of an optical measurement system, and metrology system to this endZEISS CARL SMT GMBH·Filed 2021·Application pending·0 cites
- 0447US10948637B2Metrology system having an EUV optical unitZEISS CARL SMT GMBH·Filed 2018·Granted Mar 16, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →