Inventor · disambiguated record
Randall A. Hardin
Also filed as: HARDIN RANDALL · HARDIN RANDALL A
5 granted patents·26 citations·filing 2007–2012
77Inventor score
Top patents by PatentIndex Score
5 records- 0181US8152954B2Showerhead electrode assemblies and plasma processing chambers incorporating the sameBETTENCOURT GREG·Filed 2007·Granted Apr 10, 2012·7 cites·22 claims
- 0280US8187414B2Anchoring inserts, electrode assemblies, and plasma processing chambersHARDIN RANDALL·Filed 2009·Granted May 29, 2012·11 cites·17 claims
- 0373US8268117B2Showerhead electrodesBETTENCOURT GREG·Filed 2012·Granted Sep 18, 2012·1 cites·17 claims
- 0471US8043470B2Electrode/probe assemblies and plasma processing chambers incorporating the sameLAM RES CORP·Filed 2007·Granted Oct 25, 2011·4 cites·20 claims
- 0569US9023177B2Anchoring inserts, electrode assemblies, and plasma processing chambersHARDIN RANDALL·Filed 2012·Granted May 5, 2015·3 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →