Inventor · disambiguated record
Ragesh Puthenkovilakam
Also filed as: PUTHENKOVILAKAM RAGESH
3 granted patents·7 pending applications·1 citations·filing 2020–2023
49Inventor score
Files withLAM RES CORP10
Top patents by PatentIndex Score
10 records- 0176US11837441B2Depositing a carbon hardmask by high power pulsed low frequency RFLAM RES CORP·Filed 2020·Granted Dec 5, 2023·1 cites·25 claims
- 0265US2024234091A9Depositing a carbon hardmask by high power pulsed low frequency rfLAM RES CORP·Filed 2023·Application pending·0 cites
- 0351US2023268192A1In-situ hydrocarbon-based layer for non-conformal passivation of partially etched structuresLAM RES CORP·Filed 2022·Application pending·0 cites
- 0450US12456621B2Inert gas implantation for hard mask selectivity improvementLAM RES CORP·Filed 2021·Granted Oct 28, 2025·0 cites·14 claims
- 0550US2025308894A1Hardmask for high aspect ratio dielectric etch at cryo and elevated temperaturesLAM RES CORP·Filed 2023·Application pending·0 cites
- 0649US2025357135A1High aspect ratio etch with a metal or metalloid containing maskLAM RES CORP·Filed 2023·Application pending·0 cites
- 0746US2025104982A1Monitoring and control of plasma-based processesLAM RES CORP·Filed 2022·Application pending·0 cites
- 0845US12435412B2High density, modulus, and hardness amorphous carbon films at low pressureLAM RES CORP·Filed 2020·Granted Oct 7, 2025·0 cites·27 claims
- 0945US2023360922A1Robust ashable hard maskLAM RES CORP·Filed 2021·Application pending·0 cites
- 1041US2023357921A1Deposition rate enhancement of amorphous carbon hard mask film by purely chemical meansLAM RES CORP·Filed 2021·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ragesh Puthenkovilakam files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →