Inventor · disambiguated record
Raphael Nico Johan Stegen
Also filed as: STEGEN RAPHAEL NICO JOHAN
3 granted patents·0 citations·filing 2018–2021
44Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0169US11809086B2Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 7, 2023·0 cites·20 claims
- 0258US11156921B2Fluid handling structure, lithographic apparatus, and method of using a fluid handling structureASML NETHERLANDS BV·Filed 2018·Granted Oct 26, 2021·0 cites·20 claims
- 0355US11720032B2Process tool and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Aug 8, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →