Inventor · disambiguated record
Ravi Vellanki
Also filed as: VELLANKI RAVI
2 granted patents·10 pending applications·1 citations·filing 2019–2024
32Inventor score
Files withLAM RES CORP12
Top patents by PatentIndex Score
12 records- 0182US12203168B2Metal depositionLAM RES CORP·Filed 2020·Granted Jan 21, 2025·1 cites·20 claims
- 0281US2025115998A1Metal depositionLAM RES CORP·Filed 2024·Application pending·0 cites
- 0356US2025019830A1Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2023·Application pending·0 cites
- 0448US2025297362A1Gas supply line arrangementsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0547US2024249949A1Tungsten wordline fill in high aspect ratio 3d nand architectureLAM RES CORP·Filed 2022·Application pending·0 cites
- 0646US2024175134A1Conductive cooling of a low temperature pedestal operating in a high temperature deposition sequenceLAM RES CORP·Filed 2022·Application pending·0 cites
- 0744US2024203703A1Shadow ring alignment for substrate supportLAM RES CORP·Filed 2022·Application pending·0 cites
- 0844US2025266267A1Processing chamber purge plate with shroud, and pedestal shield systemLAM RES CORP·Filed 2023·Application pending·0 cites
- 0942US2023010049A1Semiconductor processing chucks featuring recessed regions near outer perimeter of wafer for mitigation of edge/center nonuniformityLAM RES CORP·Filed 2020·Application pending·0 cites
- 1041US2023260814A1Exclusion ring for substrate processingLAM RES CORP·Filed 2021·Application pending·0 cites
- 1141US2023040885A1Exclusion ring with flow paths for exhausting wafer edge gasLAM RES CORP·Filed 2021·Application pending·0 cites
- 1239US11725285B2Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2019·Granted Aug 15, 2023·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →