Inventor · disambiguated record

Rajitha Vemuri

Also filed as: VEMURI RAJITHA

1 granted patent·41 citations·filing 2017–2017

46Inventor score

Technology areasH10P

Files withLAM RES CORP1

Top patents by PatentIndex Score

1 record

0192US10923379B2Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structureLAM RES CORP·Filed 2017·Granted Feb 16, 2021·41 cites·15 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →