Inventor · disambiguated record
Reid S. Bennett
Also filed as: BENNETT REID · BENNETT REID S
5 granted patents·1 pending application·266 citations·filing 1986–2002
85Inventor score
Top patents by PatentIndex Score
6 records- 0194US5367139AMethods and apparatus for contamination control in plasma processingIBM·Filed 1989·Granted Nov 22, 1994·60 cites·32 claims
- 0289US6531331B1Monolithic integration of a MOSFET with a MEMS deviceSANDIA CORP·Filed 2002·Granted Mar 11, 2003·84 cites·19 claims
- 0384US4675072ATrench etch endpoint detection by LIFIBM·Filed 1986·Granted Jun 23, 1987·74 cites·43 claims
- 0481US5387777AMethods and apparatus for contamination control in plasma processingIBM·Filed 1992·Granted Feb 7, 1995·42 cites·26 claims
- 0535US2004012057A1Monolithic integration of a MOSFET with a MEMS deviceFiled 2002·Application pending·0 cites
- 0632US5420057ASimplified contact method for high density CMOSIBM·Filed 1994·Granted May 30, 1995·6 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →