Inventor · disambiguated record
Rene Theodorus Petrus Compen
Also filed as: COMPEN RENE THEODORUS PETRUS
17 granted patents·3 pending applications·145 citations·filing 2004–2011
93Inventor score
Files withASML NETHERLANDS BV8ALBERTI JOZEF AUGUSTINUS MARIA4COMPEN RENE THEODORUS PETRUS3ALBERT BENSELY1ASML NETHERLANDS1
Top patents by PatentIndex Score
20 records- 0195US7385670B2Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·64 cites·33 claims
- 0287US8810777B2Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support systemCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Aug 19, 2014·8 cites·14 claims
- 0384US7050147B2Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted May 23, 2006·23 cites·27 claims
- 0481US8792085B2Lithographic apparatus, substrate table, and method for enhancing substrate release propertiesPUYT MICHIEL·Filed 2010·Granted Jul 29, 2014·8 cites·17 claims
- 0581US8149387B2Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatusALBERTI JOZEF AUGUSTINUS MARIA·Filed 2008·Granted Apr 3, 2012·8 cites·13 claims
- 0680US9019476B2Lithographic apparatus and device manufacturing methodCOMPEN RENE THEODORUS PETRUS·Filed 2011·Granted Apr 28, 2015·4 cites·20 claims
- 0776US9013682B2Clamping device and object loading methodCOMPEN RENE THEODORUS PETRUS·Filed 2008·Granted Apr 21, 2015·5 cites·42 claims
- 0876US8086348B2Method of transferring a substrate, transfer system and lithographic projection apparatusALBERTI JOZEF AUGUSTINUS MARIA·Filed 2008·Granted Dec 27, 2011·7 cites·14 claims
- 0975US8384882B2Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrateASML NETHERLANDS BV·Filed 2009·Granted Feb 26, 2013·4 cites·20 claims
- 1075US8269949B2Lithographic apparatus and device manufacturing methodVERMEULEN MARCUS MARTINUS PETRUS ADRIANUS·Filed 2009·Granted Sep 18, 2012·5 cites·18 claims
- 1172US7791708B2Lithographic apparatus, substrate table, and method for enhancing substrate release propertiesASML NETHERLANDS BV·Filed 2006·Granted Sep 7, 2010·5 cites·25 claims
- 1265US7978308B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 12, 2011·2 cites·23 claims
- 1363US8902399B2Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatusCOMPEN RENE THEODORUS PETRUS·Filed 2008·Granted Dec 2, 2014·1 cites·12 claims
- 1456US9329497B2Substrate table, lithographic apparatus and device manufacturing methodALBERT BENSELY·Filed 2011·Granted May 3, 2016·1 cites·15 claims
- 1545US2008316461A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 1644US8064045B2Method of transferring a substrate, transfer system and lithographic projection apparatusALBERTI JOZEF AUGUSTINUS MARIA·Filed 2008·Granted Nov 22, 2011·0 cites·10 claims
- 1742US2009086187A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS·Filed 2008·Application pending·0 cites
- 1841US7639345B2Lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Dec 29, 2009·0 cites·11 claims
- 1938US8154709B2Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatusALBERTI JOZEF AUGUSTINUS MARIA·Filed 2010·Granted Apr 10, 2012·0 cites·29 claims
- 2038US2011013165A1Position calibration of alignment heads in a multi-head alignment systemASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →