Inventor · disambiguated record
Remco Dirks
Also filed as: DIRKS REMCO
9 granted patents·5 pending applications·17 citations·filing 2010–2024
80Inventor score
Top patents by PatentIndex Score
14 records- 0187US8645109B2Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structuresDIRKS REMCO·Filed 2010·Granted Feb 4, 2014·9 cites·17 claims
- 0283US8706455B2Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structuresVAN BEURDEN MARTIJN CONSTANT·Filed 2010·Granted Apr 22, 2014·5 cites·29 claims
- 0379US10627213B2Statistical hierarchical reconstruction from metrology dataASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·2 cites·20 claims
- 0468US10592618B2Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 17, 2020·1 cites·20 claims
- 0561US2024385531A1Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0660US11429763B2Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Aug 30, 2022·0 cites·20 claims
- 0758US2024061347A1Modular autoencoder model for manufacturing process parameter estimationASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0858US2024060906A1Modular autoencoder model for manufacturing process parameter estimationASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0957US2024354552A1Modular autoencoder model for manufacturing process parameter estimationASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1056US11392043B2Method and metrology apparatus for determining estimated scattered radiation intensityASML NETHERLANDS BV·Filed 2019·Granted Jul 19, 2022·0 cites·7 claims
- 1152US11994806B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2020·Granted May 28, 2024·0 cites·20 claims
- 1245US2023288815A1Mapping metrics between manufacturing systemsASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1343US11556060B2Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Jan 17, 2023·0 cites·19 claims
- 1440US10151985B2Process flagging and cluster detection without requiring reconstructionASML NETHERLANDS BV·Filed 2016·Granted Dec 11, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →