Inventor · disambiguated record
Ren-Guan Duan
Also filed as: DUAN REN-GUAN
46 granted patents·28 pending applications·815 citations·filing 2003–2024
98Inventor score
Files withAPPLIED MATERIALS INC52TAIWAN SEMICONDUCTOR MFG CO LTD10SUN JENNIFER Y8SUN JENNIFER2BANDA SUMANTH1
Top patents by PatentIndex Score
74 records- 0199US9212099B2Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramicsAPPLIED MATERIALS INC·Filed 2013·Granted Dec 15, 2015·56 cites·15 claims
- 0299US9090046B2Ceramic coated article and process for applying ceramic coatingAPPLIED MATERIALS INC·Filed 2013·Granted Jul 28, 2015·68 cites·12 claims
- 0398US9034199B2Ceramic article with reduced surface defect density and process for producing a ceramic articleAPPLIED MATERIALS INC·Filed 2012·Granted May 19, 2015·47 cites·20 claims
- 0498US8367227B2Plasma-resistant ceramics with controlled electrical resistivityAPPLIED MATERIALS INC·Filed 2007·Granted Feb 5, 2013·71 cites·8 claims
- 0598US8034734B2Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatusAPPLIED MATERIALS INC·Filed 2010·Granted Oct 11, 2011·90 cites·10 claims
- 0698US7696117B2Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmasAPPLIED MATERIALS INC·Filed 2007·Granted Apr 13, 2010·132 cites·35 claims
- 0797US8858745B2Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmasSUN JENNIFER Y·Filed 2008·Granted Oct 14, 2014·50 cites·6 claims
- 0897US8758858B2Method of producing a plasma-resistant thermal oxide coatingSUN JENNIFER Y·Filed 2012·Granted Jun 24, 2014·38 cites·9 claims
- 0997US8623527B2Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxideSUN JENNIFER Y·Filed 2011·Granted Jan 7, 2014·27 cites·7 claims
- 1097US8129029B2Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coatingSUN JENNIFER Y·Filed 2007·Granted Mar 6, 2012·39 cites·10 claims
- 1196US9394615B2Plasma resistant ceramic coated conductive articleAPPLIED MATERIALS INC·Filed 2012·Granted Jul 19, 2016·43 cites·20 claims
- 1296US9017765B2Protective coatings resistant to reactive plasma processingSUN JENNIFER Y·Filed 2009·Granted Apr 28, 2015·33 cites·9 claims
- 1396US8871312B2Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamberSUN JENNIFER Y·Filed 2012·Granted Oct 28, 2014·21 cites·5 claims
- 1495US9051219B2Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxideAPPLIED MATERIALS INC·Filed 2013·Granted Jun 9, 2015·16 cites·11 claims
- 1594US10403535B2Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2015·Granted Sep 3, 2019·11 cites·17 claims
- 1693US8916021B2Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereofSUN JENNIFER·Filed 2011·Granted Dec 23, 2014·33 cites·18 claims
- 1790US9556507B2Yttria-based material coated chemical vapor deposition chamber heaterAPPLIED MATERIALS INC·Filed 2014·Granted Jan 31, 2017·4 cites·16 claims
- 1886US10840112B2Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxideAPPLIED MATERIALS INC·Filed 2019·Granted Nov 17, 2020·2 cites·10 claims
- 1985US11279661B2Heat treated ceramic substrate having ceramic coatingAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·1 cites·15 claims
- 2085US9384950B2Chamber coatingsAPPLIED MATERIALS INC·Filed 2015·Granted Jul 5, 2016·4 cites·17 claims
- 2184US11299805B2Plasma corrision resistive heater for high temperature processingAPPLIED MATERIALS INC·Filed 2019·Granted Apr 12, 2022·3 cites·19 claims
- 2283US10364197B2Heat treated ceramic substrate having ceramic coatingAPPLIED MATERIALS INC·Filed 2015·Granted Jul 30, 2019·1 cites·12 claims
- 2380US11264261B2High temperature electrostatic chuck bonding adhesiveAPPLIED MATERIALS INC·Filed 2016·Granted Mar 1, 2022·2 cites·22 claims
- 2480US10266943B2Plasma corrosion resistive heater for high temperature processingAPPLIED MATERIALS INC·Filed 2014·Granted Apr 23, 2019·4 cites·10 claims
- 2580US2024384401A1Multilayer ald coating for critical components in process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2679US10847386B2Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxideAPPLIED MATERIALS INC·Filed 2019·Granted Nov 24, 2020·1 cites·6 claims
- 2778US9520314B2High temperature electrostatic chuck bonding adhesiveSUN JENNIFER Y·Filed 2009·Granted Dec 13, 2016·4 cites·23 claims
- 2878US9428424B2Critical chamber component surface improvement to reduce chamber particlesAPPLIED MATERIALS INC·Filed 2015·Granted Aug 30, 2016·1 cites·20 claims
- 2978US2021317049A1Heat treated ceramic substrate having ceramic coatingAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3077US11047043B2Chamber liner for high temperature processingAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·0 cites·18 claims
- 3177US10612135B2Method and system for high temperature cleanAPPLIED MATERIALS INC·Filed 2017·Granted Apr 7, 2020·2 cites·20 claims
- 3275US11373882B2Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxideAPPLIED MATERIALS INC·Filed 2020·Granted Jun 28, 2022·0 cites·10 claims
- 3374US12275832B2Fluorine-containing elastomer composition and method for making cured fluorine-containing elastomer compositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 15, 2025·0 cites·20 claims
- 3474US12049697B2Multilayer ALD coating for critical components in process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 30, 2024·0 cites·20 claims
- 3572US9975320B2Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heaterAPPLIED MATERIALS INC·Filed 2014·Granted May 22, 2018·2 cites·12 claims
- 3669US7128850B2Electrically conductive Si-Ti-C-N ceramicsUNIV CALIFORNIA·Filed 2003·Granted Oct 31, 2006·9 cites·22 claims
- 3768US11731907B2Ceramic material with high thermal shock resistance and high erosion resistanceAPPLIED MATERIALS INC·Filed 2020·Granted Aug 22, 2023·0 cites·15 claims
- 3867US10480068B2Chamber liner for high temperature processingAPPLIED MATERIALS INC·Filed 2017·Granted Nov 19, 2019·0 cites·19 claims
- 3966US10840113B2Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxideAPPLIED MATERIALS INC·Filed 2019·Granted Nov 17, 2020·0 cites·10 claims
- 4062US2019019655A1Plasma resistant semiconductor processing chamber componentsAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4162US2025149302A1Anti-plasma coatingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4261US10157731B2Semiconductor processing apparatus with protective coating including amorphous phaseAPPLIED MATERIALS INC·Filed 2015·Granted Dec 18, 2018·0 cites·12 claims
- 4360US9896376B2Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agentAPPLIED MATERIALS INC·Filed 2014·Granted Feb 20, 2018·0 cites·18 claims
- 4459US10242888B2Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistanceAPPLIED MATERIALS INC·Filed 2013·Granted Mar 26, 2019·0 cites·7 claims
- 4559US2024060173A1System for processing semiconductor device, method for forming semiconductor device, and method for forming protective structure on chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 4659US2015299050A1Ceramic coated article and process for applying ceramic coatingAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4759US2025125161A1Etch tool with spinel-based composite material componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4858US2010140222A1Filled polymer composition for etch chamber componentSUN JENNIFER Y·Filed 2009·Application pending·0 cites
- 4957US9597734B2Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereofAPPLIED MATERIALS INC·Filed 2014·Granted Mar 21, 2017·0 cites·11 claims
- 5057US2025246390A1Sealing articles for plasma resistance applicationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
Showing the top 50 of 74 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →