Inventor · disambiguated record
Reimar Finken
Also filed as: FINKEN REIMAR
2 granted patents·2 pending applications·1 citations·filing 2021–2025
31Inventor score
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0176US11415894B2Projection exposure system for semiconductor lithography having an optical arrangementZEISS CARL SMT GMBH·Filed 2021·Granted Aug 16, 2022·1 cites·20 claims
- 0264US12436473B2Optical element, optical system, lithography system, and method for operating an optical elementZEISS CARL SMT GMBH·Filed 2022·Granted Oct 7, 2025·0 cites·20 claims
- 0359US2025208521A1Arrangement, method and computer program product for calibrating facet mirrorsZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0453US2022373899A1Projection exposure apparatus with a thermal manipulatorZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →